A behavioral model of angular rate micromechanical sensor to modeling in MatLab software package Simulink environment
Abstract
A behavioral model of angular rate micromechanical sensor to modeling in MatLab software package Simulink environment
Incoming article date: 13.12.2014The work is devoted to the synthesis of a angular rate sensor behavioral model based on the mathematical model of this device in the differential equations form using MatLab software package Simulink environment. The results of the dynamics simulation of the synthesized behavioral sensor model in the form of transient and spectral analysis of the system reaction are shown. The main idea of analysis is to study the frequency parameters and damping properties of the object. The experiment has identified high quality factor of the oscillatory system, due to small damping, it is reflected by the slow decay of transient and pronounced resonances.
Keywords: microsystem technology, microelectromechanical systems, electronic components, gyroscope, electrostatics, design, model, modeling, transient, spectral analysis