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Modeling a micromechanical gyroscope-accelerometer LR-type

Abstract

Modeling a micromechanical gyroscope-accelerometer LR-type

I.E. Lysenko

Incoming article date: 19.03.2013

The received results of modelling of a micromechanical sensor of angular speeds and linear accelerations are considered. 

Keywords: microsystm technology, element base, modeling, sensor, gyroscope, accelerometer